In a statement, the alliance said: "NATO acknowledges civilian casualties in Tripoli strike".
"It appears that one weapon did not strike the intended target and that there may have been a weapons system failure which may have caused a number of civilian casualties," the statement added.
"NATO regrets the loss of innocent civilian lives," said Libyan mission commander Lieutenant-General Charles Bouchard.
"Although we are still determining the specifics of this event, indications are that a weapons system failure may have caused this incident," he added.
Libyan officials showed reporters five bodies, including two toddlers, they said were among nine civilians killed, as pressure mounted on the alliance to allow a political solution.
Journalists were taken to the Al-Arada district of Tripoli before 1:00 am (2300 GMT Saturday) to see rescue teams and bystanders desperately searching for survivors among the wreckage of a two-storey block of flats.
An AFP correspondent saw two bodies pulled from the rubble.
Journalists were then taken to a Tripoli hospital where they were shown the bodies of a woman and two toddlers who officials said were members of the same family and had died in the raid.
Government spokesman Mussa Ibrahim said four passers-by were also killed, bringing the death toll to nine, and that 18 people were wounded. (*)
Editor: Kunto Wibisono
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